JPH0284319U - - Google Patents
Info
- Publication number
- JPH0284319U JPH0284319U JP16401188U JP16401188U JPH0284319U JP H0284319 U JPH0284319 U JP H0284319U JP 16401188 U JP16401188 U JP 16401188U JP 16401188 U JP16401188 U JP 16401188U JP H0284319 U JPH0284319 U JP H0284319U
- Authority
- JP
- Japan
- Prior art keywords
- heat
- plate
- semiconductor wafer
- nameplate
- wafer carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000000049 pigment Substances 0.000 claims 1
- 229920003002 synthetic resin Polymers 0.000 claims 1
- 239000000057 synthetic resin Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16401188U JPH0284319U (en]) | 1988-12-20 | 1988-12-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16401188U JPH0284319U (en]) | 1988-12-20 | 1988-12-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0284319U true JPH0284319U (en]) | 1990-06-29 |
Family
ID=31449246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16401188U Pending JPH0284319U (en]) | 1988-12-20 | 1988-12-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0284319U (en]) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03116041U (en]) * | 1990-03-14 | 1991-12-02 | ||
| JPH088332A (ja) * | 1994-06-17 | 1996-01-12 | Shin Etsu Polymer Co Ltd | ウェーハ収納容器におけるウェーハバスケット |
| KR100521314B1 (ko) * | 1997-10-13 | 2005-12-30 | 삼성전자주식회사 | 반도체장치제조용웨이퍼이송기구 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5624147B2 (en]) * | 1976-08-10 | 1981-06-04 |
-
1988
- 1988-12-20 JP JP16401188U patent/JPH0284319U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5624147B2 (en]) * | 1976-08-10 | 1981-06-04 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03116041U (en]) * | 1990-03-14 | 1991-12-02 | ||
| JPH088332A (ja) * | 1994-06-17 | 1996-01-12 | Shin Etsu Polymer Co Ltd | ウェーハ収納容器におけるウェーハバスケット |
| KR100521314B1 (ko) * | 1997-10-13 | 2005-12-30 | 삼성전자주식회사 | 반도체장치제조용웨이퍼이송기구 |